Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone

Abstract

In this work, we present a novel thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the physical properties of the gas. The gas sensor has all the benefits of CMOS technology, including low cost and miniaturization. Here, we demonstrate its application for CO2 gas detection.

Cite as:

Hopper, R.; Popa, D.; Tsoutsouras, V.; Udrea, F.; Stanley-Marbell, P. Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone. Proceedings of the 4th International Conference nanoFIS 2020, 56, 3. https://doi.org/10.3390/proceedings2020056003

BibTeX:

@Article{proceedings2020056003,
    AUTHOR = {Hopper, Richard and Popa, Daniel and Tsoutsouras, Vasileios and Udrea, Florin and Stanley-Marbell, Phillip},
    TITLE = {Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone},
    JOURNAL = {Proceedings of the 4th International Conference nanoFIS 2020},
    VOLUME = {56},
    YEAR = {2020},
    NUMBER = {1},
    ARTICLE-NUMBER = {3},
    URL = {https://www.mdpi.com/2504-3900/56/1/3},
    ISSN = {2504-3900},
    ABSTRACT = {In this work, we present a novel thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the physical properties of the gas. The gas sensor has all the benefits of CMOS technology, including low cost and miniaturization. Here, we demonstrate its application for CO2 gas detection.},
    DOI = {10.3390/proceedings2020056003}
}